Novel Temperature and Vibration Tolerant Packaging for Inertial Sensors (MEMS) Navy STTR FY2012.A Sol No.: Navy STTR FY2012.A Topic No.: N12A-T008 Topic Title: Novel Temperature and Vibration Tolerant Packaging for Inertial Sensors (MEMS) Proposal No.: N12A-008-0070 Firm: ePack, Inc. 333 Parkland Plaza, Suite #100 Ann Arbor, Michigan 48103 Contact: Sangwoo Lee Phone: (734) 709-3837 Web Site: www.memsepack.com Abstract: The objective of the proposal is to demonstrate the feasibility of a generic package that provides high vacuum, temperature control and vibration isolation for a wide range of high performance (tactical and navigation grade) micromachined inertial sensors. Inertial sensors (accelerometers and gyroscopes) are now widely used in consumer and industrial applications. However, for high performance navigation and targeting applications there are several packaging challenges which act as roadblocks to their commercialization including: i) their need for low vacuum pressures (<1-10 mTorr), ii) their sensitivity to outside temperature changes and iii) their vibration sensitivity. ePack's environment resistant package (ERP), addresses all of these issues with low vacuum, oven control and vibration isolation. Furthermore, it uses 100 times less power than standard ovens, is more than 200 times smaller than standard vibration isolators, and is small enough (<<1 cubic centimeter) to be integrated onto a standard circuit board. In Phase I the ePack/University of Michigan team will survey the specification for all of the inertial sensor technologies currently on the market and being researched and will model their performance in the ERP in order to develop a series of design rules and standard package designs. Benefits: High performance (tactical and navigation grade) inertial sensors are a key technology for next generation navigation and targeting systems and will replacing much larger (> 100 times larger) ring laser gyroscopes (RLG), fiber optic gyroscopes (FOG) and hemispherical resonant gyroscopes (HRG). This could enable a wide range of man portable targeting and navigation systems and unmanned aerial vehicles (UAVs). This could also enable many satellite pointing, telescope pointing and the navigation and control of ultraminiaturized satellites. Return