N092-100 TITLE: Analysis of Prognostic Sensor Technologies for MEMS Applications in Military Systems

TECHNOLOGY AREAS: Materials/Processes, Sensors, Electronics, Weapons

ACQUISITION PROGRAM: PMA-261, H-53 Helicopter Program, ACAT I PMS-408, JCREW Jammers ACAT I/II

OBJECTIVE: Explore the use of health management and prognostic sensor technologies in micro-electro-mechanical systems (MEMS) to facilitate sense and response logistics in military system applications

DESCRIPTION: A Micro-Electro-Mechanical System (MEMS) is the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate through micro fabrication technology. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., Complimentary Metal Oxide Semiconductor (CMOS), Bipolar, or BICMOS processes), the micromechanical components are fabricated using compatible "micromachining" processes that selectively etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices.

MEMS promises to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, making possible the realization of complete systems-on-a-chip. MEMS is an enabling technology which allows for the development of smart products; augments the computational ability of microelectronics with the perception and control capabilities of micro sensors and micro actuators; and expands the space of possible designs and applications. Because MEMS devices are manufactured using batch fabrication techniques similar to those used for integrated circuits, unprecedented levels of functionality, reliability, and sophistication can be placed on a small silicon chip at a relatively low cost.

The health of military equipment platforms is affected by their severe use profiles over a wide range of application environments and these affects are known. The amount of useful life left in systems aboard the platform (via prognostic estimation) can be greatly aided by historical temperature, humidity, shock-vibration data and stress-strain data. A MEMS system that could log this data as part of the platform would greatly improve life cycle cost and operational effectiveness issues concerning such systems.

This research will start with a technology road map for the integration and miniaturization of such technologies leading to the demonstration on an EW system such as Joint Counter Radio Controlled Improvised Explosive Device Electronic Warfare (JCREW) and rotary wing aircraft such as the CH-53.

PHASE I: Investigate and identify the scientific merit and capabilities of the proposed technologies and manufacturing processes for making health management and prognostic data collection feasible at the miniature level via MEMS technology. Provide an initial specification for a MEMS device with nominal sensor capabilities to facilitate off-board analysis of data for prognostic (remaining useful life) estimations for Navy Rotary Wing Platforms and JCREW EW system applications. .

PHASE II: Develop and test of a pre-production prototype module capable of measuring temperature, humidity, stress-strain and shock with the cost, power, and form-factor targets specified in Phase I.

PHASE III: Manufacturing of full-production MEMS modules for integration with Navy and other DoD Rotary Wing Platforms. In addition, produce miniature MEMS sensor systems with a serial (SPI or I2C) bus for condition monitoring of various DoD systems including avionics, aircraft engines and hydraulic and mechanical systems in rotary wing platform applications and EW systems in ground mobile platforms. A goal of the program is to obtain a device when fully packaged with the power source (battery) would be no larger than 0.5 cubic inches.

PRIVATE SECTOR COMMERCIAL POTENTIAL/DUAL-USE APPLICATIONS: Potential is enormous as it relates to applications beyond military applications. MEMS health management and prognostic technology can be applied beyond data collection and analysis for just military platforms and be used in a real-time way for active systems health management and prognostics. This can apply to other military platforms as well as their counterparts in commercial industries.

REFERENCES:
1. W. Bracke, P. Merken, R. Puers, C. Van Hoof, "Generic Architectures and Design Methods for Autonomous Sensors," vol. 135, no. 2, April 2007, pp. 881-888.

2. T.B. Tang, E. A. Johannessen, L. Wang, A. Astaras, M. Ahmadian, A. F. Murray, J. M. Cooper, S. P. Beaumont, B. W. Flynn, D. Cumming, "Toward a Miniature Wireless Integrated Multisensor Microsystem for Industrial and Biomedical Applications," IEEE Sensors Journal, vol. 2, no. 6, Dec. 2002, pp. 628-635.

3. A.J. Mason, N. Yazdi, A.V. Chavan, K. Najafi, and K.D. Wise, "A Generic Multi-Element Microsystem For Portable Wireless Applications," Invited Paper, Special Issue of Proceedings of the IEEE, vol. 86, no. 8, pp. 1733-1746, August 1998.

4. Marotta, Stephen A., et al, Predictive Reliability of Tactical Missiles Using Health Monitoring Data And Probabilistic Engineering Analysis, First International Forum on Integrated System Health Engineering and Management in Aerospace, November 7-10, 2005, downloadable at: http://ic.arc.nasa.gov/projects/ishem/Papers/Marotta_Munitions.doc

5. Valentine, R.; Holmes, R., "Real Time Data Management in Prognostic Systems", Aerospace Conference, 2007 IEEE, Volume, Issue, 3-10 March 2007 Page(s):1 – 5.

6. Vachtsevanos, George, Lewis, Frank L., Roemer, Michael, Hess, Andrew and Wu, Biqing, "Intelligent Fault Diagnosis and Prognosis for Engineering Systems", Wiley-VCH, 2006.

7. N. Yazdi, "CMOS Interface Circuitry and Electromechanical Modeling of A Precision Silicon Accelerometer," Invited Talk, MEMS Interface Circuits Workshop, sponsored by IEEE Solid-State Circuits and Technology Committee, Arlington, VA, Oct. 1999.

8. A.J. Mason, N. Yazdi, A.V. Chavan, K. Najafi, and K.D. Wise, "A Generic Multi-Element Microsystem For Portable Wireless Applications," Invited Paper, Special Issue of Proceedings of the IEEE, vol. 86, no. 8, pp. 1733-1746, August 1998.

KEYWORDS: Sensors; prognostics; health management; EW, airborne; rotary wing;

** TOPIC AUTHOR (TPOC) **

DoD Notice:   Between April 20 and May 17, 2009, you may talk directly with the Topic Authors to ask technical questions about the topics. Their contact information is listed above. For reasons of competitive fairness, direct communication between proposers and topic authors is not allowed starting May 18, 2009, when DoD begins accepting proposals for this solicitation.

However, proposers may still submit written questions about solicitation topics through the DoD's SBIR/STTR Interactive Topic Information System (SITIS), in which the questioner and respondent remain anonymous and all questions and answers are posted electronically for general viewing until the solicitation closes. All proposers are advised to monitor SITIS (09.2 Q&A) during the solicitation period for questions and answers, and other significant information, relevant to the SBIR 09.2 topic under which they are proposing.

If you have general questions about DoD SBIR program, please contact the DoD SBIR Help Desk at (866) 724-7457 or email weblink.