High Temperature MEMS Sensor Suite for Health Monitoring System of Turbine Engine Components Navy SBIR FY2006.1 Sol No.: Navy SBIR FY2006.1 Topic No.: N06-024 Topic Title: High Temperature MEMS Sensor Suite for Health Monitoring System of Turbine Engine Components Proposal No.: N061-024-0943 Firm: Sporian Microsystems, Inc. 515 Courtney Way Suite B Lafayette, Colorado 80026 Contact: Wenge Zhang Phone: (303) 516-9075 Web Site: www.sporian.com Abstract: To monitor the engine health status of gas turbine engine components, miniaturized, robust sensors would be highly advantageous for measuring and monitoring physical parameters, such as temperature, strain. The end objective of this proposed work is to develop, single, high temperature (1200 �C), MEMS, silicon carbide nitride (SiCN)-based temperature and strain sensor suite suitable for a wide range a uses in gas turbine, evaluate the feasibilities of wireless communication capabilities of (SiCN)-based sensor which is integrated on engine components. Our technical approach is to use SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures. In addition, the various processing technologies, such as photolithography, DRIE etching, injection molding, embossing, and precise machining can be utilized for the fabrication of the SiCN MEMS devices. Work tasks will include the evaluations of material electrical properties, existing and new sensor designs, process techniques and suitability, and analytical and numerical modeling for design verification, and feasibility of wireless telemetry for proposed application. Technical challenges lie in that the sensors have to survive extremely harsh working conditions, including high temperatures (as high as 1200 �C), mechanical, thermal, fatigue loads, and oxidizing and corrosive environments. Benefits: Strike fighter and land based turbine engines, power generation facilities, and industries were high temperatures prohibit existing sensors would benefit from the sensor technology of this proposal. The conditions in these industries are harsh, and sensors must be able to withstand high temperatures, oxidizing, corrosive environments, and the presence of particulates. The technology can be expanded for existing and future turbine engines and propulsions systems to improve life time, efficiency and reduce emissions. The technology described in this proposal would allow the next boundary in sensing technology to be achieved. Commercial applications abound for the successful results of this proposal in the turbine engine industry, which is made up of companies such as GE and Siemens to name a few. Except turbine engine of fighter system, additional potential market areas include: aerospace, automotive, infrastructure, oil and gas, and government and academic laboratories. Return