Novel High-Turbine Operational SiCN MEMS Sensor Suite Navy SBIR FY2006.2 Sol No.: Navy SBIR FY2006.2 Topic No.: N06-111 Topic Title: Novel High-Turbine Operational SiCN MEMS Sensor Suite Proposal No.: N062-111-0021 Firm: Sporian Microsystems, Inc. 515 Courtney Way Suite B Lafayette, Colorado 80026 Contact: Kevin Harsh Phone: (303) 516-9075 Web Site: www.sporian.com Abstract: To improve the working performance, increase efficiency, reduce pollution, reduce cost, and monitor and track engine health status and failure modes of turbine engines and advanced propulsion systems, miniaturized, robust sensing systems for measuring and monitoring physical parameters, such as pressure and temperature, would be highly advantageous. The end objective of this proposed work to develop a single MEMS silicon carbide nitride (SiCN)-based pressure and temperature sensor, and packaging technology suitable for a wide range of turbine engines applications, with an operational range to 1400�C, and the ability to survive short duration (5-10 minute) temperature excursions to 1800�C. Our technical approach is to leverage a proprietary sensor technology based on SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures. Work tasks will translating the existing technology for this application, including: modifying material formulations, evaluating and defining sensor designs, evaluating and modifying fabrication processes, evaluating and defining the packaging/interface, and proof of principle feasibility experiments. Based on conversations with GE Aviation, for Phase I, we have initially targeted the GE-T64 engine system as the initial representative engine system, and several specific locations of interest within that engine. Benefits: Aerospace and land based turbine engines, power generation facilities, and industries were high temperatures prohibit existing sensors would benefit from the sensor technology of this proposal. The conditions in these industries are harsh, and sensors must be able to withstand high temperatures, high pressures, corrosive environments, and the presence of particulates. In order for existing and future turbine engines and propulsions systems to improve efficiency and reduce emissions more accurate and complete information is necessary. Commercial applications abound for the successful results of this proposal in the turbine engine industry, but additional potential market areas include: aerospace, automotive, infrastructure, oil and gas, and government and academic laboratories. Return