A sensitive survivable MEMS accelerometer Navy SBIR FY2012.1 Sol No.: Navy SBIR FY2012.1 Topic No.: N121-102 Topic Title: A sensitive survivable MEMS accelerometer Proposal No.: N121-102-0688 Firm: Agiltron Corporation 15 Presidential Way Woburn, Massachusetts 01801-1040 Contact: Luzhong Yin Phone: (781) 935-1200 Web Site: http://www.agiltron.com Abstract: Leveraging on our experience in MEMS component and sensor system fabrication, Agiltron proposes to realize a new type of MEMS accelerometer that will not only survive the extreme accelerations outlined in the SBIR topic (shock at least 40,000 g in all axes, high electromagnetic fields (E > 5,000 V/m, B > 2 T), and surface temperatures of > 800 deg C), but will also provide measurement from initial launch and maintain performance after the excitation with a simple scalable mechanism and high precision. In the Phase I program, the feasibility of the proposed accelerometer technology will be demonstrated through both design simulation and sensor fabrication. Benefits: The proposed scalable MEMS micro-accelerometer will benefit guided projectiles, missiles, mortars, UAVs and UGVs. Other applications such as robotic systems, high-speed and precision production machinery will be also benefit from the current program. The benefited commercial fields include automotive, industrial, medical and aerospace. Return