High-Power MEMS Phase Shifter Integrated Circuits
Navy SBIR FY2014.1

Sol No.: Navy SBIR FY2014.1
Topic No.: N141-034
Topic Title: High-Power MEMS Phase Shifter Integrated Circuits
Proposal No.: N141-034-0420
Firm: MEMtronics Corporation
1301 N. Plano Road
Richardson, Texas 75081
Contact: Chuck Goldsmith
Phone: (214) 552-7055
Web Site: www.memtronics.com
Abstract: This project proposes the hybrid integration of the lowest loss MEMS switches (MEMtronicsT capacitive MEMS switches) and the lowest loss phase shifter configurations. Together, the newer MEMS technology mated with well-established phase shifter technology, offers a "game changing" solution for low-loss, high-power phase shifter components at X-band.
Benefits: The developed component will enable low-cost, passive ESA architectures to become a reality. The use of "array thinning" to reduce the number of electronic modules behind the antenna elements greatly reduces the hardware costs of the electronically scanned antenna array. The use of hybrid assembly techniques minimizes the real estate of expensive semiconductor processes (the MEMS switches) and makes maximum use of well-established thick- and thin-film processing technology to minimize the cost of MEMS phase shifters. This further reduces the cost of array electronics and makes possible the development of inexpensive electronically scanned antennas for a variety of Navy systems.